E01600 - SEMI E16 - Guide for Determining and Describing Mass Flow Controller Leak Rates StdDcs-Superseded It covers both conventional metal

It covers both conventional metal face sealing and surface mount gas delivery systems

The scope of this Standard is to define WJOBJ which represents WJ

Elongation

This Standard defines a model which represents logistics management of a carrier in equipment as Carrier Logistics Job (CLJ)

E01600 - SEMI E16 - Guide for Determining and Describing Mass Flow Controller Leak Rates StdDcs-Superseded It covers both conventional metalThe purpose of this Guide is to establish a uniform, worldwide means for describing and measuring leak rates of mass flow controllers (MFCs). The leak integrity of a gas delivery system is important to maintaining product quality and performance. This Guide is intended to prevent confusion and misunderstanding between manufacturers and users. In particular, it distinguishes between mechanical and diffusion leak rates. This Guide contains definitions