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F03700 - SEMI F37 - ガス供給システム構成部品の表面粗さパラメータの算出方法 Revision:SEMI F37-0299 (Reapproved 0611) - Superseded Current edition approved by the
F03700 - SEMI F37 - ガス供給システム構成部品の表面粗さパラメータの算出方法 Revision:SEMI F37-0299 (Reapproved 0611) - Superseded Current edition approved by the
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Description
Current edition approved by the Japanese Regional Standards Committee on January 9
3 This Test Method describes methods for preparation of slices and wafers of the III-V compound semiconductors GaAs
and GaP with {100} or {111} surfaces by structural etching
and forecast over six quarters
F03700 - SEMI F37 - ガス供給システム構成部品の表面粗さパラメータの算出方法 Revision:SEMI F37-0299 (Reapproved 0611) - Superseded Current edition approved by theglobal Gases Committee2011513global Audits and Reviews Subcommittee20116www. semiviews. org www. semi. org19992200411 : Referenced SEMI Standards None.
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 - Superseded Current edition approved by the){kind=link}