E18400 - SEMI E184 - Specification for 300 mm Tape Frame FOUP Load Port StdTpc-Mask and Mask Equipment Seven region of the world

Seven region of the world are covered in this summary including North America

the user of this Document can generate specifications for silicon annealed wafers

Changes were made to ¶ 7

The Guide does not apply to measurement systems used to control intermediate process steps during Si wafer manufacturing

E18400 - SEMI E184 - Specification for 300 mm Tape Frame FOUP Load Port StdTpc-Mask and Mask Equipment Seven region of the world1 Purpose 1. 1 The purpose of this Specification is to define the basic interface dimensions of a load port on the semiconductor manufacturing equipment (SME), where a 300 mm Tape Frame FOUP can be loaded and unloaded. The intention of this Specification is to define a set of requirements and features to enable interoperability of load ports and Tape Frame FOUPs without limiting innovative solutions. 2 Scope 2. 1 The interface specification in this